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ROBOT Maker ASYST ModelSpartan Spartan Wafer engine OEM Mattson Suprema Nova VeraflexII, ASML YieldStar S-100, KLA MicroRSP-A300 ​ ​ ​ Maker ASYST ModelSpartan AXYS 21 OEM GSI Sigmaclean 300 ​ ​ ​ ​ Maker Brooks Automation ModelSpartan Magnatran 7 OEM LAM, Novellus, Jusung IPS, Eugenetech, Canon-Anelva, etc. ​ ​ ​ ​ Maker Brooks Automation ModelSpartan Magnatran 8 OEM Novellus, AMEC, Veeco, Aixtron, S..
Spartan Sorter/EFEM Spartan Sorter/EFEM Sale of Spartan Sorter/EFEM | Modification & Overhaul | Part & Labor Service | Robot overhaul & repair ​ ​ ​ Maker ASYST Model Compact with 2 I/Os ​ ​ ​ Maker ASYST Model Compact with 3 I/Os Maker ASYST Model Compact with 4 I/Os E-MAMIL : sales@sdsol.net​​ TEL : 070-8633-0067
E84 Tester Semi E84 Handheld tester with Active Signal Control ​ ​ ​ ​ ​ [Key Features] The most simple and easy test for SEMI E84 handoff Automated active signal control for load /unload handoff test Manual active signal control for load/unload handoff test Rechargeable battery Alarm Display / TA1, TA2, TA3, Ho off ​ ​ ​ [Dimension] E-MAMIL : sales@sdsol.net​​ TEL : 070-8633-0067
SMIF VERSAPORT2200 용 Mask Inspection Solution SMIF VERSAPORT2200 용 Mask Inspection ​ ​ ​ [Key Features] Checking the position of the top & bottom face of the mask using the vision system Interlock function to prevent loading of incorrectly placed mask Accurate and fast inspection Mask inspection during Mask Pod opening Easy user interface by 10” touch monitor Enhanced Pod Opener maintenance ​ [Dimension] E-MAMIL : sales@sdsol.net​​ TEL : 07..
MLUD Foup Manual Load&Unload System to link OHT [Key Features] ​ Fully SEMI compliant, SEMI S2 Certified Host communication by GEM/SECS protocol Integrated RFID and E84 OHT handoff Double safety device applied / light curtain & auto up-down door 2 Port type : 1 in put ,1 out put / 2 in put / 2 out put Carrie Type : SEMI compliant Foup, auto FOSB ​ ​ ​ [Dimension] E-MAMIL : sales@sdsol.net​​ TEL : 070..
SORTER/EFEM _ SWAT3200 웨이퍼 이송 장비 SORTER_ SWAT3200은 12inch, 8inch 및 2by2 모두 적용 가능한 모듈입니다.(1) SWAT3200_2IO 12inch (2) SWAT3200_2IO 8inch (3) SWAT3200_2BY2 12inch  [Key Features]Improve your Fab & equipment efficiencyRobust & reliableFast and easy to install and maintainFully SEMI compliant, SEMI S2 CertifiedSimplicity equals improved Cost of OwnershipSuperior Foup & AMHS interoperabilityScalable architecture with common..

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