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이송 로봇의 위치 정밀도 측정 장비_RGTS Foup 안의 wafer를 기준으로 Robot EE와 실시간 level, 거리측정비젼 분석을 통한 로봇 Teaching reference.         자세한 사항은 아래 연락처로 문의 부탁드립니다.  tel : 070-8633-0067Email : sales@sdsol.net
E84 Controller E84 PI/O Optical Transceiver ​ ​ [방식] ​ ​ ​ [Key Features] User Friendly GUI Simple setup environment Set IP and Communicate with MCS/EAP (SECS Protocol) One IPC can maximum Control 10 sets of E84 Controllers Extendable software workable with MR or AGV for future extensions Easy Logs Views can cache back 6-month logs IPC specs Intel I7 CPU and 16 GB Ram (I5 CPU, 8GB RAM Customizable depending on..
E84 Tester Semi E84 Handheld tester with Active Signal Control ​ ​ ​ ​ ​ [Key Features] The most simple and easy test for SEMI E84 handoff Automated active signal control for load /unload handoff test Manual active signal control for load/unload handoff test Rechargeable battery Alarm Display / TA1, TA2, TA3, Ho off ​ ​ ​ [Dimension] E-MAMIL : sales@sdsol.net​​ TEL : 070-8633-0067
SMIF VERSAPORT2200 용 Mask Inspection Solution SMIF VERSAPORT2200 용 Mask Inspection ​ ​ ​ [Key Features] Checking the position of the top & bottom face of the mask using the vision system Interlock function to prevent loading of incorrectly placed mask Accurate and fast inspection Mask inspection during Mask Pod opening Easy user interface by 10” touch monitor Enhanced Pod Opener maintenance ​ [Dimension] E-MAMIL : sales@sdsol.net​​ TEL : 07..
MLUD Foup Manual Load&Unload System to link OHT [Key Features] ​ Fully SEMI compliant, SEMI S2 Certified Host communication by GEM/SECS protocol Integrated RFID and E84 OHT handoff Double safety device applied / light curtain & auto up-down door 2 Port type : 1 in put ,1 out put / 2 in put / 2 out put Carrie Type : SEMI compliant Foup, auto FOSB ​ ​ ​ [Dimension] E-MAMIL : sales@sdsol.net​​ TEL : 070..
SORTER/EFEM _ SWAT3200 웨이퍼 이송 장비 SORTER_ SWAT3200은 12inch, 8inch 및 2by2 모두 적용 가능한 모듈입니다.(1) SWAT3200_2IO 12inch (2) SWAT3200_2IO 8inch (3) SWAT3200_2BY2 12inch  [Key Features]Improve your Fab & equipment efficiencyRobust & reliableFast and easy to install and maintainFully SEMI compliant, SEMI S2 CertifiedSimplicity equals improved Cost of OwnershipSuperior Foup & AMHS interoperabilityScalable architecture with common..