Foup Manual Load&Unload System to link OHT
[Key Features]
Fully SEMI compliant, SEMI S2 Certified
Host communication by GEM/SECS protocol
Integrated RFID and E84 OHT handoff
Double safety device applied / light curtain & auto up-down door
2 Port type : 1 in put ,1 out put / 2 in put / 2 out put
Carrie Type : SEMI compliant Foup, auto FOSB
[Dimension]
E-MAMIL : sales@sdsol.net
TEL : 070-8633-0067